| Zugriffsnummer | 33992 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Silicon probing tips coated with protective aluminum oxide thin films for fast tactile cantilever sensors |
| Autor(in); Institution |
Wasisto, Hutomo Suryo; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY; Laboratory of Emerging Nanotechnology (LENA), Braunschweig, GERMANY
Yu, Feng; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY
Doering, Lutz; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Völlmeke, Stefan; CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, Erfurt, GERMANY
Deeb, Manal Ali; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Bakin, Andrey; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY; Laboratory of Emerging Nanotechnology (LENA), Braunschweig, GERMANY
Waag, Andreas; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY; Laboratory of Emerging Nanotechnology (LENA), Braunschweig, GERMANY
Peiner, Erwin; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY; Laboratory of Emerging Nanotechnology (LENA), Braunschweig, GERMANY
|
| Quelle/Jahr | Proceedings SENSOR 2015:(2015), 575 - 579 |
| Availability | [Online] |
| ISBN | 978-3-9813484-8-4 |
| DOI | |
| URL | |
| Verlag | Wunstorf: AMA Service |
| Konferenzangaben | SENSOR + TEST 2015, Nuremberg, 19-21, May, 2015, Germany |
| Freie Schlagworte | silicon microprobe tips ; atomic-layer deposition (ALD) ; high-aspect-ratio microform metrology ; fast surface roughness scanning systems ; piezoresistive cantilever sensors |
| Zusammenfassung | Silicon microprobe tips are fabricated and integrated with piezoresistive cantilever sensors for fast surface roughness scanning systems. A combination of wet and inductively coupled plasma (ICP) cryogenic dry etching processes is employed to create high-aspect-ratio tips. For the wear-resistant tip coatings, atomic-layer deposition (ALD) technique is applied to deposit conformal ~14 nm thick aluminum oxide (Al2O3) layers using a binary reaction sequence in low thermal process with precursors of trimethyl aluminum (TMA) and water (H2O). From the preliminary friction and wear data, the developed silicon cantilever sensor has been successfully used in 100 fast scanning measurements along 5-mm-long surface traces on a standard artifact with a speed of 15 mm/s and forces of 60-100 μN. These tactile sensors are targeted for use in high-aspect-ratio microform metrology. |
Zitierung
Wasisto, H. S., Yu, F., Doering, L., Völlmeke, S., Deeb, M. A., Brand, U., Bakin, A., Waag, A., & Peiner, E. (2015). Silicon probing tips coated with protective aluminum oxide thin films for fast tactile cantilever sensors. SENSOR + TEST 2015, Nuremberg, 19-21, May, 2015, Germany. https://doi.org/10.5162/sensor2015/d4.3