| Zugriffsnummer | 33895 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | In-situ characterisation of nanomechanical measurement instruments using a force transfer standard with interferometric deflection measurement |
| Autor(in); Institution |
Li, Zhi; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 15th international conference of the European Society for Precision Engineering and Nanotechnology:(2015), 145 - 146 |
| Herausgeber(in) |
Leach, R.
|
| ISBN | 978-0-9566790-7-9 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 15th International Conference & Exhibition of the European Society for Precision Engineering & Nanotechnology, Leuven, 01-05, June, 2015, Belgium |
| Freie Schlagworte | micro-force measurement ; interferometric deflection measurement ; nanomechanical instrument |
| Zusammenfassung | To improve the capability of cantilever, beam and membrane-based force transfer standards for in-situ force characterisation with relatively broad measurement range and high resolution, a laser interferometer with sub-nanometer resolution is added to a silicon force transfer standard, whose bending stiffness has been well calibrated. The fast data acquisition system of the laser interferometer enables not only quasi-static force measurement, but also dynamic force characterisation for nanomechanical measurements. The fundamental principle of the proposed system is detailed. A prototype of the closed-loop force standard is realized. In-situ characterisation of the indentation force of a nanoindentation instrument using this prototype is reported in this manuscript. |
Zitierung
Li, Z., Gao, S., & Brand, U. (2015). In-situ characterisation of nanomechanical measurement instruments using a force transfer standard with interferometric deflection measurement. 15th International Conference & Exhibition of the European Society for Precision Engineering & Nanotechnology, Leuven, 01-05, June, 2015, Belgium.