| Zugriffsnummer | 33718 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Smart sensors and calibration standards for high precision metrology |
| Autor(in); Institution |
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Doering, Lutz; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Li, Zhi; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Xu, Min; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Bütefisch, Sebastian; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Peiner, Erwin; TU Braunschweig, Institut für Semiconductor Technology, Braunschweig, GERMANY
Frühauf, Joachim; SiMETRICS GmbH, Limbach-Oberfrohna, GERMANY
Hiller, Karla; Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, GERMANY
|
| Quelle/Jahr | Smart Sensors, Actuators, and MEMS VII; and cyber physical systems:(2015), 95170V-1 - 95170V-10 |
| Schriftenreihe | Proceedings of SPIE: 9517 |
| Herausgeber(in) |
Sanchez-Rojas, Jose-Luis
|
| ISBN | 978-1-6284-1639-8 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Conference on Smart Sensors, Actuators and MEMS VII, Barcelona, 04-06, May, 2015, Spain |
| Freie Schlagworte | 2D microprobe ; reference spring ; MEMS double spring ; meander spring ; soft material testing artefact ; tip characterizer |
| Zusammenfassung | The paper summarize the PTB activities in the field of silicon sensors for dimensional metrology especially roughness measurements and silicon calibration standards developed during the past ten years. A focus lies in the development of 2D silicon microprobes which enable roughness measurements in nozzles as small as 100 µm in diameter. Moreover these microprobes offer the potential for very fast tactile measurements up to 15 mm/s due to their tiny mass and therefore small dynamic forces. When developing high precision tactile sensors care has to be taken, not to scratch the often soft surfaces. Small probing forces and well defined tip radii have to be used to avoid surface destruction. Thus probing force metrology and methods to determine the radius and form of probing tips have been developed. Silicon is the preferred material for the calibration of topography measuring instruments due to its excellent mechanical and thermal stability and due to the fabrication and structuring possibilities of silicon microtechnology. Depth setting standards, probing force setting standards, tip radius and tip form standards, reference springs and soft material testing artefacts will be presented. |
Zitierung
Brand, U., Gao, S., Doering, L., Li, Z., Xu, M., Bütefisch, S., Peiner, E., Frühauf, J., & Hiller, K. (2015). Smart sensors and calibration standards for high precision metrology. SPIE Conference on Smart Sensors, Actuators and MEMS VII, Barcelona, 04-06, May, 2015, Spain. https://doi.org/10.1117/12.2179455