| Zugriffsnummer | 33653 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine |
| Autor(in); Institution |
Qian, Shinan; Brookhaven National Laboratory, National Synchrotron Light Source II, Upton, NY, USA
Geckeler, Ralf D.; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Just, Andreas; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Idir, Mourad; Brookhaven National Laboratory, National Synchrotron Light Source II, Upton, NY, USA
Wu, Xuehui; Beijing Institute of High Energy Physics, Beijing, CHINA
|
| Quelle/Jahr | Nuclear Instruments and Methods in Physics Research A: 785 (2015), 206 - 212 |
| ISSN | 0168-9002 |
| DOI | |
| URL | |
| Verlag | Amsterdam: Elsevier |
| Freie Schlagworte | Nano-accuracy metrology ; Optical surface measurements ; Figure ; Synchrotron radiation |
| Zusammenfassung | Since the development of the Nano-Optic-Measuring Machine (NOM), the accuracy of measuring the profile of an optical surface has been enhanced to the 100-nrad rms level or better. However, to update the accuracy of the NOM system to sub-50 nrad rms, the large saw-tooth deviation (269 nrad rms) of an existing electronic autocollimator, the Elcomat 3000/8, must be resolved. We carried out simulations to assess the saw-tooth-like deviation. We developed a method for setting readings to reduce the deviation to sub-50 nrad rms, suitable for testing plane mirrors. With this method, we found that all the tests conducted in a slowly rising section of the saw-tooth show a small deviation of 28.8 to <40 nrad rms. We also developed a dense-measurement method and an integer-period method to lower the saw-tooth deviation during tests of sphere mirrors. Further research is necessary for formulating a precise test for a spherical mirror. We present a series of test results from our experiments that verify the value of the improvements we made. |
Zitierung
Qian, S., Geckeler, R. D., Just, A., Idir, M., & Wu, X. (2015). Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine. Nuclear Instruments and Methods in Physics Research A, 785, 206–212. https://doi.org/10.1016/j.nima.2015.02.065