| Zugriffsnummer | 33571 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Double-ended Fizeau interferometers with phase-stepping evaluation for measurements of cubes |
| Autor(in); Institution |
Nicolaus, Arnold; 5.13, Interferentielle Längenmessung, PTB-Braunschweig
Kang, Chu-Shik; Korea Research Institute of Standards and Science, SOUTH KOREA
Bönsch, Gerhard; 5.13, Interferentielle Längenmessung, PTB-Braunschweig
|
| Quelle/Jahr | Recent developments in optical gauge block metrology : 20 - 21 July 1998, San Diego, California:(1998), 109 - 115 |
| Schriftenreihe | SPIE proceedings series: 3477 |
| ISBN | 0-8194-2932-5 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Recent developments in optical gauge block metrology, San Diego, Calif., 20-21, July, 1998, USA |
| Freie Schlagworte | CCD cameras ; Dimensional metrology ; Fabry-Perot interferometers ; Fizeau interferometer ; Interferometers ; Interferometry ; Optical systems ; Phase shifting ; Reflection ; Servomechanisms |
Zitierung
Nicolaus, A., Kang, C.-S., & Bönsch, G. (1998). Double-ended Fizeau interferometers with phase-stepping evaluation for measurements of cubes. Recent developments in optical gauge block metrology, San Diego, Calif., 20-21, July, 1998, USA. https://doi.org/10.1117/12.323098