| Zugriffsnummer | 33533 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | A calibrated scanning force microscope and example of its application |
| Autor(in); Institution |
Bienias, Martin; 5.21, Härte und Schichtdicke, PTB-Braunschweig und Berlin
Hasche, Klaus; 5.2, Industrielle Meßtechnik, PTB-Braunschweig
Herrmann, Konrad; 5.21, Härte und Schichtdicke, PTB-Braunschweig und Berlin
Seemann, Reiner; 8.201, Medizinische Messdatenerfassungssysteme, PTB-Berlin
Thiele, Kerstin; 8.33, Spielgeräte, PTB-Berlin
|
| Quelle/Jahr | Proceedings of the 2rd Seminar on Quantitative Microscopy : geometrical measurements in the micro- and nanometre range with far and near field methods, on 6th and 7th November 1997 in Wien, Austria:(1997), 62 - 70 |
| Schriftenreihe | PTB-Bericht PTB-F-30 |
| Herausgeber(in) |
Hasche, Klaus; 5.2, Industrielle Meßtechnik, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
|
| ISSN | 0179-0609 |
| ISBN | 3-89701-082-8 |
| Berichtsnummer | PTB-F-30 |
| Verlag | Bremerhaven: Wirtschaftsverl. NW |
| Konferenzangaben | 2rd Seminar on Quantitative Microscopy, Vienna, 6-7, November, 1997, Austria |
| Zusammenfassung | A commercial scanning force microscope (SFM) was equipped with an additional three-dimensional position measurement system consisting of three laser interferometers. The interferometers serve to further improve its metrological performance and calibration. The basic intention of this approach is to understand the SFM as a miniature three-coordinate measuring instrument with spatially dependent metrological performance. The modified SFM, the kind of calibration of the SFM and related results are discussed. The SFM is now applied for selected calibrations and topographical measurements. |
