| Zugriffsnummer | 33199 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | T-shaped microprobe and gap measurement standard for inner microstructures |
| Autor(in); Institution |
Wedmann, Achim; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Kniel, Karin; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Krah, Thomas; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Härtig, Frank; 1, Mechanik und Akustik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of 11th IMEKO Symposium LMPMI 2014 (Laser Metrology for Precision Measurement and Inspection in Industry):(2014) |
| Availability | [USB-Stick] |
| ISBN | 978-92-990075 |
| Verlag | Niigata: Akatsuki Printing Corporation |
| Konferenzangaben | 11th Laser Metrology for Precision Measurement and Inspection in Industry 2014, Tsukuba, 02-06, September, 2014, Japan |
| Freie Schlagworte | Microstructures ; internal microthreads ; tactile T-shaped microprobe ; self-centering probing ; probe quantification |
| Zusammenfassung | To an ever-increasing extent, the constantly progressing miniaturization of components requires a constantly decreasing size of complex internal microstructures such as, for example, internal microthreads. These are used in large numbers, among other in the clock industry and in medical engineering. At the same time, they are allowed to show only very small tolerances. Thus, it is indispensable to carry out measurements in parallel to the manufacturing of the parts. But reliable quality assurance for these internal microstructures has been impossible so far. For that reason, the Physikalisch-Technische Bundesanstalt (PTB) has developed - in cooperation with partners from industry - a complete chain of procedures for the calibration of internal microthreads down to a nominal diameter of 0.7 mm and a lead of 0.175 mm (Fig. 1). To determine the most important measurement parameter - the pitch diameter - on microthreads, probe tips with a diameter significantly smaller than 300 μm up to 120 μm are required. For this purpose, a new tactile T-shaped microprobe (Fig. 2) was designed which has been realized and adapted to a coordinate measurement machine (CMM). An important characteristic of the new design is that the spherical probe tips can be exchanged in the case of wear while the expensive body of the stylus shaft can be re-used. |
