| Zugriffsnummer | 32741 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | X-ray expertise - Micromeasurement |
| Autor(in); Institution |
Müller, Matthias; 7.2, Kryophysik und Spektrometrie, PTB-Berlin
|
| Quelle/Jahr | International Innovation:(2014), 96 - 98 |
| ISSN | 2041-4552 |
| Verlag | Bristol: Research Media |
| Zusammenfassung | X-ray Expertise: Nanometrology CHARACTERISATION OF HIGH-K NANOLAYERS BY GRAZING INCIDENCE X-RAY SPECTROMETRY PTB is researching and developing new metrology methods to enable non-destructive and traceable access to physical and chemical properties of nanostructured and novel materials based on X-ray spectrometry. This includes developing methods and instruments using Synchrotron Radiation, radiometrically calibrated spectrometers and improved quantitative modeling of the interaction of X-rays with nanostructured materials. |
