| Zugriffsnummer | 32251 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Surface topography of superpolished silicon spheres |
| Autor(in); Institution |
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Hinzmann, Günter; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Lück, Alexander; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 14th International Conference of the European Society for Precision Engineering and Nanotechnology: 2 (2014), 99 - 102 |
| Herausgeber(in) |
Leach, R.
|
| ISBN | 978-0-9566790-3-1 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 14th International Conference of Euspen, Dubrovnik, 02-06, June, 2014, Croatia |
| Zusammenfassung | Two silicon 28Si spheres for the international Avogadro Project were reworked at the Physikalisch-Technische Bundesanstalt Braunschweig (PTB). Thereafter the surfaces of the spheres showed average roughness values in the range of 0.2 nm. The ultra-smooth surface in combination with the spherical shape is a challenge for the manufacturing process as well as for the measurement of the topography. To show the importance of the interaction of manufacturing and measurement processes, an example of an effect of process variation is presented. |
