| Zugriffsnummer | 31581 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry |
| Autor(in); Institution |
Endres, Johannes; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Kumar, Nitish; TU Delft, Delft, THE NETHERLANDS
Petrik, Peter; TU Delft, Delft, THE NETHERLANDS
Henn, Mark-Alexander; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Heidenreich, Sebastian; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Pereira, Silvania; TU Delft, Delft, THE NETHERLANDS
Urbach, Paul; TU Delft, Delft, THE NETHERLANDS
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | Optical Micro- and Nanometrology V:(2014), 913208-1 - 913208-9 |
| Schriftenreihe | Proceedings of SPIE: 9132 |
| Herausgeber(in) |
Gorecki, Christophe
|
| ISSN | 0277-786X |
| ISBN | 978-1-62841-080-8 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Photonics Europe, Brussels, 14-17, April, 2014, Belgium |
| Zusammenfassung | Scatterometry is an indirect measurement technique reconstructing the dimensions and geometry of the structures under test from the measured scatterograms by applying inverse rigorous calculations. In this paper we will focus on two different scatterometric measurement methods: a goniometric DUV scatterometer and a coherent scanning Fourier scatterometer. In the first case the light intensity and polarization state of the diffracted optical far field is measured at different angels of incidence (AOI). The typically high angular resolution and high dynamic range together with a wide scope of AOI’s provide sufficient information for the reconstruction of the structure parameters under the condition that enough diffraction orders are available. However, the measurement in most realizations is restricted to non conical diffraction and the diffraction pattern has to be scanned in a sequential manner. In scanning coherent Fourier scatterometry the illumination spot of a spatially coherent laser source is scanned over the sample within one period of the grating. The resulting interferogram of the first and zero diffraction order is recorded. This method extends the conventional coherent Fourier Scatterometry (CFS) by using the principle of temporal phase-shifting interferometry. It has been shown that under certain conditions the improvement in sensitivity is more than fourfold compared to incoherent optical scatterometry. We will present a comparison between these two methods by analyzing the measurement results on a silicon wafer with 1D gratings having periods between 300 nm and 600 nm. The measurements have been performed with PTB’s goniometric DUV scatterometer and the coherent scanning Fourier scatterometer at TU Delft. Furthermore we will give intermediate results about the benefits and limitations of these methods. Moreover for the parameter reconstruction of the goniometric measurement data we apply a Maximum likelihood estimation, which provides the statistical error model parameters directly from measurement data. |
Zitierung
Endres, J., Kumar, N., Petrik, P., Henn, M.-A., Heidenreich, S., Pereira, S., Urbach, P., & Bodermann, B. (2014). Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry. SPIE Photonics Europe, Brussels, 14-17, April, 2014, Belgium. https://doi.org/10.1117/12.2052819