| Zugriffsnummer | 31487 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Design and evaluation of a primary high‐vacuum standard |
| Autor(in); Institution |
Jitschin, Wolfgang; PTB-Berlin
Jousten, Karl; 9.14, Vakuumphysik, PTB-Berlin
Wandrey, Dietrich; 9.14, Vakuumphysik, PTB-Berlin
|
| Quelle/Jahr | Journal of Vacuum Science and Technology A: 10 (1992), 5, 3344 - 3351 |
| ISSN | 0734-2101 |
| DOI | |
| Verlag | New York, NY: AIP |
| Zusammenfassung | Calibration pressures in the high‐ and ultrahigh‐vacuum range are conveniently generated by the expansion of gas in a continuous flow. The design and the performance of a new continuous (often called dynamic) expansion standard and a partly computer‐controlled flowmeter are reported. Pressures are generated from 10-6 to 10-2 Pa with uncertainties (2σ, linear addition of individual uncertainties) between 1% and 4%. A comparison with a static expansion standard was carried out and showed good conformity between the two standards. |
