| Zugriffsnummer | 31433 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | A non-contact measurement of radiometric apertures with an optical microtopography sensor |
| Autor(in); Institution |
Fischer, Joachim; 9.21, Strahlungsthermometrie, PTB-Berlin
Stock, Michael; 9.21, Strahlungsthermometrie, PTB-Berlin
|
| Quelle/Jahr | Measurement Science and Technology: 3 (1992), 8, 693 - 698 |
| ISSN | 0957-0233 |
| DOI | |
| Verlag | London: IOP |
| Klassifikationscode | PACS: 42.62.Eh ; PACS: 06.30.Bp ; PACS: 42.79.Ag ; PACS: 06.20.Dk ; PACS: 07.60.Dq |
| Freie Schlagworte | Instrumentation and measurement ; Optics, quantum optics and lasers |
| Zusammenfassung | In precision optical radiometry one of the accuracy limiting factors is the measurement uncertainty for the area determination of the beam limiting apertures. A technique for measuring these areas very precisely has been developed. In order to avoid damaging the fragile edges of the apertures a noncontact method for their detection is applied. A focused laser beam is used to measure the height profile of the aperture near its edge with a high lateral resolution. The height profile observed makes it possible to calculate the mean diameter of the aperture with an uncertainty of 0.4 mu m (68.3% confidence limits). The experimental set-up and the measurement technique are explained in detail. Representative results are shown and an estimation of the individual contributions to the uncertainty is given. |
