| Zugriffsnummer | 31325 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Development of a traceable profilometer for high-aspect-ratio microstructures metrology |
| Autor(in); Institution |
Xu, Min; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Kirchhoff, Jürgen; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Surface Topography: Metrology and Properties: 2 (2014), 2, 1 - 6 |
| Artikelnummer | 024002 |
| Availability | [online only] |
| ISSN | 2051-672X |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Klassifikationscode | PACS: 06.30.Bp ; PACS: 07.60.Ly ; PACS: 85.50.-n ; PACS: 07.10.Pz |
| Freie Schlagworte | High aspect ratio ; Microstructure ; Micro hole ; Profile ; Surface Metrology ; Profilometer |
| Zusammenfassung | A profilometer using a slender silicon cantilever with an integrated tip and piezoresistive strain gauge was developed to traceably characterize the roughness of high-aspect-ratio micro structures. With a width down to 3μm and a length of up to 5 mm, the cantilevers enable to measure the roughness profiles inside micro holes with diameters of 100μm and less. Three laser interferometers with 1 nm resolution are arranged perpendicularly to each other at the head of the profilometer to provide metrological traceability with a system uncertainty of ±10 nm for the step height and roughness measurements. Finally, successful measurements of the roughness inside a micro hole of 100μm in diameter and the profiles at the entry of the micro hole are presented. |
