| Zugriffsnummer | 30982 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | In-situ nondestructive characterization of the normal spring constant of AFM cantilevers |
| Autor(in); Institution |
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 25 (2014), 4, 044014-1 - 044014-7 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Science |
| Konferenzangaben | 10th Seminar on Quantitative Microscopy (QM) and 6th Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2013), Paris, 25-26, April, 2013, France |
| Klassifikationscode | PACS: 68.37.Ps ; PACS: 07.07.Mp ; PACS: 85.85.+j ; PACS: 81.70.-q ; PACS: 06.20.Jr |
| Freie Schlagworte | Cantilever calibration ; Dynamic reference spring ; Nanoforce transducer |
| Zusammenfassung | The calibration of the performance of an AFM (atomic force microscopes) cantilever has gained more and more interest in the past years, particularly due to increasing applications of SFMs for the determination of the mechanical properties of materials, such as biological structures and organic molecules. A variety of approaches have already been proposed to characterize the spring constant of AFM cantilevers, in which a so called "active reference spring (ARS)" method based on a well developed micro-machined nano-force transducer has been developed by PTB. The ARS method features (1) no need for pre-knowledge of the AFM cantilevers and (2) in-situ determination of the "onsite" spring constant of cantilevers. One main disadvantage of the ARS method is the relatively high test force applied to the sharp tips of the cantilevers, especially for hard cantilevers (k ) 50 N/m) this will cause a high risk of tip damage. In this paper, to further extend the capability of the quasi-static ARS method, and especially to overcome the tip damage, a dynamic reference spring (DRS) method based on the MOEMS nanoforce transducer developed in the PTB is proposed, in which only small cantilever deflections will be used and thus the contact force between theAFM cantilever tip and the transducer is quite small and non-destructive to the tip. |
