| Zugriffsnummer | 30672 |
| Dokumenttyp | Buchartikel |
| Sprache | Englisch |
| Titel | Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range |
| Autor(in); Institution |
Gottwald, Alexander; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Smart sensors and MEMS Intelligent devices and microsystems for industrial applications:(2014), 102 - 123 |
| Herausgeber(in) |
Nihtianov, Stoyan; Delft University of Technology, Delft, THE NETHERLANDS
Luque, Antonio; University of Seville, Sevill, SPAIN
|
| ISBN | 978-0-85709-502-2 |
| DOI | |
| Verlag | Cambridge, UK: Woodhad Publishing Limited |
| Freie Schlagworte | VUV/EUV radiation ; silicon photodetectors ; spectral responsivity ; radiation hardness ; VUV/EUV radiation damage |
| Zusammenfassung | In this chapter, the numerous challenges in reliablemeasurement of vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) radiation with silicon radiation detectors will be discussed. The most severe issue is the high absorbance of any kind of material in these spectral ranges, which poses stringent requirements on possible detector designs. In particular, a high value of the spectral responsivity and the necessary radiation hardness put contradicting demands on the devices. In order to fi nd a solution, it is necessary to describe and understand in detail the basic physical processes for the interaction between the radiation and the detector. The spectral responsivity of VUV and EUV detectors is measured using monochromatized synchrotron radiation as a radiation source, and electrical substitution radiometers as primary detector standards. We will present selected types of silicon-based semiconductor detectors, and discuss their performance in the context of the named aspects. |
Zitierung
Gottwald, A. & Scholze, F. (2014). Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range. In S. Nihtianov & A. Luque (Eds.), Smart sensors and MEMS Intelligent devices and microsystems for industrial applications (pp. 102–123). Cambridge, UK: Woodhad Publishing Limited. https://doi.org/10.1533/9780857099297.1.102