| Zugriffsnummer | 30376 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region |
| Autor(in); Institution |
Kleineberg, Ulf; Univ. Bielefeld, GERMANY
Stock, Hans-Juergen; Univ. Bielefeld, GERMANY
Menke, D.; Univ. Bielefeld, GERMANY
Osterried, K.; Univ. Bielefeld, GERMANY
Schmiedeskamp, Bernt; Univ. Bielefeld, GERMANY
Heinzmann, Ulrich; Univ. Bielefeld, GERMANY
Fuchs, Detlef; 9.23, Vakuum-UV-Strahlungsmeßtechnik, PTB-Berlin
Müller, Peter; 9.23, Vakuum-UV-Strahlungsmeßtechnik, PTB-Berlin
Scholze, Frank; 9.23, Vakuum-UV-Strahlungsmeßtechnik, PTB-Berlin
Heidemann, Klaus F.; Carl Zeiss, GERMANY
Nelles, Bruno; Carl Zeiss, GERMANY
Thieme, Juergen; Georg-August-Univ. Goettingen, GERMANY
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| Quelle/Jahr | Advances in multilayer and grazing incidence x-ray/EUV/FUV optics: 24-26 July 1994, San Diego, California:(1994), 269 - 282 |
| Schriftenreihe | Proceedings of SPIE: 2279 |
| ISSN | 0277-786X |
| ISBN | 0-8194-1603-7 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Conference, San Diego, Calif., 24-26, July, 1994, USA |
| Freie Schlagworte | multilayers ; reflection ; X-rays ; zone plates ; diffraction ; dispersion ; carbon ; coating ; optical components ; optics |
| Zusammenfassung | Here we report on the fabrication and analysis of two different types of laterally structured multilayers, which act as highly efficient x-ray optical elements for focusing or spectral dispersion of soft x-rays at (near) normal incidence. The microfocusing of soft x-rays at (near) normal incidence with plane reflection optics can be obtained by multilayer Bragg-Fresnel zone plates. A circular condensor zone plate structure (2.9 mm diameter, 417 zones, inner zone radius 50 micrometers , outer zone width 0.9 micrometers ) has been recorded by holographic lithography followed by ion beam etching into a Mo-Si multilayer mirror of 24 periods and a doublelayer thickness of 7.2 nm. The focusing properties analyzed by soft x-ray reflectometry at (lambda) equals 13.8 nm show a focal spot size smaller than 40 micrometers measured 160 mm behind the multilayer zone plate. Multilayer blazed gratings offer the opportunity for highly resolved spectral dispersion of soft x-rays due to the possible combination of high efficiency and high diffraction orders with almost the whole intensity diffracted in one diffraction order. The sawtooth profile of a blazed grating structure (1221 l/mm, blaze angle 1.5 degree(s)) has been ruled into a 200 nm thick Au-film which has been deposited onto a plane glass substrate. A Mo/Si multilayer of 15 periods and a doublelayer thickness of 7.2 nm has been deposited onto the grating substrate. In order to smooth the rough Au-surface and to prevent interdiffusion of the Au-film with the upper Mo-Si multilayer a carbon film has been evaporated onto the Au-grating surface before the deposition of the soft x-ray coating. This procedure results in a significant increase of diffraction efficiency. The multilayer grating has been matched working on blaze in the third diffraction order, where an absolute diffraction efficiency of 3.4% at (lambda) equals 14 nm has been measured, while only 1.1% has been achieved for a similar grating without a carbon interlayer. |
Zitierung
Kleineberg, U., Stock, H.-J., Menke, D., Osterried, K., Schmiedeskamp, B., Heinzmann, U., Fuchs, D., Müller, P., Scholze, F., Heidemann, K. F., Nelles, B., & Thieme, J. (1994). Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region. Conference, San Diego, Calif., 24-26, July, 1994, USA. https://doi.org/10.1117/12.193143