| Zugriffsnummer | 30375 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region |
| Autor(in); Institution |
Kleineberg, U.; Faculty of Physics, University of Bielefeld, Bielefeld, GERMANY
Osterried, K.; Faculty of Physics, University of Bielefeld, Bielefeld, GERMANY
Stock, H.-J.; Faculty of Physics, University of Bielefeld, Bielefeld, GERMANY
Menke, D.; Faculty of Physics, University of Bielefeld, Bielefeld, GERMANY
Schmiedeskamp, B.; Faculty of Physics, University of Bielefeld, Bielefeld, GERMANY
Fuchs, Detlef; 9.23, Vakuum-UV-Strahlungsmeßtechnik, PTB-Berlin
Müller, Peter; 9.23, Vakuum-UV-Strahlungsmeßtechnik, PTB-Berlin
Scholze, Frank; 9.23, Vakuum-UV-Strahlungsmeßtechnik, PTB-Berlin
Heidemann, K. F.; Carl Zeiss Company, Oberkochen, GERMANY
Nelles, B.; Carl Zeiss Company, Oberkochen, GERMANY
Heinzmann, U.; Faculty of Physics, University of Bielefeld, Bielefeld, GERMANY
|
| Quelle/Jahr | Applied Optics: 34 (1995), 28, 6506 - 3512 |
| ISSN | 0026-1394 (PRINT) ; 1681-7575 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP-Publ. |
| Zusammenfassung | Two Mo/Si multilayer-coated blazed gratings have been fabricated for operation at soft-x-ray wavelengths above the Si L edge, λ ≥ 12.4 nm, at (near) normal incidence. The sawtooth profile of the grating structure was mechanically ruled into a 200-nm Au film that was deposited onto a plane glass substrate. To smooth the rough Au surface and to prevent interdiffusion of the Au film with the upper Mo/Si multilayer, a carbon film was evaporated onto the Au grating surface of one of the gratings before the deposition of the multilayer coating. We matched the multilayer grating, working on blaze in the third diffraction order, in which an absolute diffraction efficiency of 3.4% at a wavelength of 14 nm was measured, whereas only 1.1% was achieved for a similar grating (without a carbon interlayer). These efficiencies are higher than those obtained for other ruled blazed gratings reported in the literature. As a result of the multilayer and grating periodicity, the wavelength of diffraction can be tuned by a rotation of the grating, which is important for application in a soft-x-ray monochromator. |
Zitierung
Kleineberg, U., Osterried, K., Stock, H.-J., Menke, D., Schmiedeskamp, B., Fuchs, D., Müller, P., Scholze, F., Heidemann, K. F., Nelles, B., & Heinzmann, U. (1995). Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region. Applied Optics, 34(28), 6506–3512. https://doi.org/10.1364/ao.34.006506