| Zugriffsnummer | 29985 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Geometry distortions of nanostructure edges scanned with amplitude-modulated atomic force microscopes |
| Autor(in); Institution |
Hüser, Dorothee; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Häßler-Grohne, Wolfgang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Hüser, Jonathan; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
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| Quelle/Jahr | Measurement Science and Technology: 24 (2013), 11, 115008-1 - 115008-9 |
| ISSN | 0957-0233 |
| DOI | |
| URL | |
| Verlag | Bristol: IOP |
| Klassifikationscode | PACS: 07.79.Lh ; PACS: 81.16.Ta ; PACS: 68.37.Ps ; PACS: 81.07.-b ; PACS: 06.30.Bp ; PACS: 61.46.-w |
| Freie Schlagworte | amplitude-modulated atomic force microscopy ; inverse problem ; tip–sample interaction ; high aspect ratio nanostructure ; geometry distortion ; topography scan ; cantilever response ; phase contrast in AFM ; dissipation |
| Zusammenfassung | In nanotechnology and semiconductor fabrication geometry parameters of nanostructures such as curvatures and side wall angles are of increasing relevance with decreasing feature sizes. The atomic force microscope (AFM) is still one of the main measurement tools employed to investigate topographical parameters. It is generally operated in oscillation mode in order to avoid wear or damage of the probe. As imaging instruments deliver data that are influenced by the probing process, appropriate reconstruction processes are needed. This paper shows a significant contrast of the phase lag of the probe of an amplitude-modulated AFM (AM-AFM) and its driving force at the edge transition of nanostructures with a high aspect ratio. A simulation model reveals the relation between interaction forces and the observed phase behavior. It illustrates how the equilibrium positions of an oscillating probe differ from those of a sample geometry that is purely dilated by static probe tip contact. We show that AFM measurements in oscillation mode deliver a distorted topography image and that the greater the distortion the more energy dissipation is involved. An understanding of the distortion mechanism forms the basis for the development of reconstruction strategies. Corrigendum: Measurement Science and Technology 28 (2017), 109501 |
| Relation |
https://doi.org/10.1088/1361-6501/aa7d8b – (Corrigendum)
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