| Zugriffsnummer | 29554 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | New standards for high resolution 3D measurements with optical techniques |
| Autor(in); Institution |
Felgner, Andre; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Krüger-Sehm, Rolf; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Ahbe, Thomas; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Nanoscale 2013 : 10th Seminar on Nanoscale Calibration Standards and Methods ; 6th Seminar on Quantitative Microscopy ; dimensional and related measurements in the micro- and nanometre range:(2013), 157 - 158 |
| Verlag | [s.l.]: |
| Konferenzangaben | 10th Seminar on Quantitative Microscopy (QM) and 6th Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2013), Paris, 25-26, April, 2013, France |
| Freie Schlagworte | optical microscopy ; metrological characteristics ; standards ; transfer function ; topography resolution |
| Zusammenfassung | Modern optical instruments are becoming increasingly more important in different areas of metrology. Today they can provide fast measurements in the nanometre range with good accuracy and a high degree of repeatability. Although the lateral resolution is physically limited by the diffraction, the vertical resolution can be as high as a few nanometres or even better. The reliability of such measurements is, particularly in the field of 3D topography, significantly influenced by instrument characteristics and measurement conditions. For a correct understanding of such measurements, it is therefore required to acquire a precise knowledge about these characteristics. In the project "KALWINT" with institutes, universities and microscope manufacturers, we have developed prototypes of standards to verify or to calibrate the properties of optical microscopes used for topographic measurements. The aim of those prototypes is to enable the users of various optical techniques to characterize critical parameters of their microscopes. With these samples and the results obtained, the user can take the individual instrument behaviour, e.g. lateral resolution of topographic measurements, into account and correct the measurements accordingly within certain limits. Consequently, special novel reference samples are needed to assess the instrument characteristics as precisely as possible in an easy, practical way. Within the talk we will firstly describe the different types of multi-step-height prototypes developed for the calibration of the complete vertical axis of optical microscopes incl. axis non-linearities (example in Figure 1), secondly two types of so-called chirp-grating structures with a variation of the structure widths from 90 µm to 10 µm (coarse version) and 12 µm to 4.3 µm (fine version, example in Figure 2) in 12 discrete steps with constant sinusoidal amplitude, i. e. the same height [1], that allows to determine the instrument transfer function and thus the topography resolution [2], and thirdly a set of two differently shaped prototypes for form measurements (angles, curvature). Together with these prototypes, procedures are developed that allow to determine the characteristics of various optical microscopes. |
Zitierung
Felgner, A., Krüger-Sehm, R., Ahbe, T., Dziomba, T., & Koenders, L. (2013). New standards for high resolution 3D measurements with optical techniques. 10th Seminar on Quantitative Microscopy (QM) and 6th Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2013), Paris, 25-26, April, 2013, France.