| Zugriffsnummer | 29476 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | An ultra-precision positioning device using interferometric feedback signals and a moving coil actuator |
| Autor(in); Institution |
Köchert, Paul; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Manske, Eberhard; TU Ilmenau, Ilmenau, GERMANY
|
| Quelle/Jahr | Proceedings of: Precision control for advanced manufacturing systems : ASPE spring topical meeting:(2013), 39 - 44 |
| Herausgeber(in) |
Trumper, David L.
|
| ISBN | 978-1-887706-62-9 |
| URL | |
| Verlag | Raleigh, NC: American Society for Precision Engineering |
| Konferenzangaben | ASPE Spring Topical Meeting 2013, Cambridge, 21-23, April, 2013, USA |
| Freie Schlagworte | displacement measurement ; heterodyne interferometry ; voice coil actuator ; subnanometer resolution ; subnanometer positioning stability |
| Zusammenfassung | This publication describes a single axis motion control system providing position stability in the sub-nanometer regime. The positioning system is driven by an electromagnetic actuator, guided by air-bearings and controlled with a highbandwidth motion controller supplied with highprecision laser interferometric feedback signals. First measurement results show that a positioning stability of less than 0.2 nm is achievable. |
