| Zugriffsnummer | 29439 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Application of 3D calibration standards for SPM drift and long term stability investigations [poster] |
| Autor(in); Institution |
Hemmleb, Matthias; m2c measurement & calibration GbR, Potsdam, GERMANY
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Xu, Min; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Danzebrink, Hans; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Nanoscale 2013 : 10th Seminar on Nanoscale Calibration Standards and Methods ; 6th Seminar on Quantitative Microscopy ; dimensional and related measurements in the micro- and nanometre range:(2013), 163 - 165 |
| Verlag | [s.l.]: |
| Konferenzangaben | 10th Seminar on Quantitative Microscopy (QM) and 6th Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2013), Paris, 25-26, April, 2013, France |
| Freie Schlagworte | Virtual AFM ; scanning probe microscopy ; atomic force microscopy ; scanning electron microscopy ; nano metrology ; calibration ; SPM ; AFM ; SEM |
| Zusammenfassung | SPM surface measurements with very high demands on the geometric accuracy in all three coordinate axes become more and more important. In contrast to the commonly used calibration procedures, that require separate lateral and height standards, real 3D-calibration makes use of spatially distributed landmarks, i.e. special unique features defined by 3D-coordinates. An example are the 3D standards by m2c with their ring-shaped landmarks, so-called nanomarkers, on a pyramidal support structure. The application of such 3D standards enables not only the calculation of spatial scales Cx, Cy and Cz and coupling factors Cxy, Cxz, Cyz, but also the estimation of 3D drift parameters as well as the investigation of the long term stability of these parameters.Upon characterization of the measurement system, initial drift and ultimate instrument stability need to be distinguished. This is accomplished by a measurement series at a 3D standard in combination with the m2c analysis software; the analysis process has recently been largely automated. Drift, usually caused by system components not yet having reached their thermal or mechanical equilibrium, typically decreases exponentially over time until the system reaches stable operating conditions and shows only a variation of position deviations without a trend into a certain direction any more. The latter characterizes the ultimate instrument stability. Consequently, the evaluation of the drift within a measurement series of sufficient duration helps to determine the idle waiting time before the actual, stable measurements can be recorded. The application of landmark based standards in combination with the m2c image processing methods allows to determine the drift in all three directions both on an image-to-image basis and partly also within an image, and reports the drift parameters e. g. as drift diagrams. If the starting conditions are the same and the drift decay turns out to be sufficiently reproducible, other measurement series recorded under the same conditions can be drift-corrected accordingly. The last measurements of the measurement series are used to assess the instrument stability after the drift is mainly over. |
Zitierung
Hemmleb, M., Dziomba, T., Pohlenz, F., Xu, M., & Danzebrink, H. (2013). Application of 3D calibration standards for SPM drift and long term stability investigations [poster]. 10th Seminar on Quantitative Microscopy (QM) and 6th Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2013), Paris, 25-26, April, 2013, France.