| Zugriffsnummer | 29358 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Results of a sensitivity analysis for the tilted-wave interferometer [poster] |
| Autor(in); Institution |
Fortmeier, Ines; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Wiegmann, Axel; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Baer, Goran; University of Stuttgart, Institut für Technische Optik (ITO), Stuttgart, GERMANY
Pruss, Christof; University of Stuttgart, Institut für Technische Optik (ITO), Stuttgart, GERMANY
Osten, Wolfgang; University of Stuttgart, Institut für Technische Optik (ITO), Stuttgart, GERMANY
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology:(2014), 701 - 706 |
| Herausgeber(in) |
Osten, Wolfgang; Universität Stuttgart, Institut für Technische Optik, Stuttgart, Gemany
|
| ISBN | 978-3-642-36358-0 ; 978-3-642-36359-7 (online) |
| DOI | |
| Verlag | Berlin ; Heidelberg: Springer |
| Konferenzangaben | Fringe 2013 - 7. International Workshop on Advanced Optical Imaging and Metrology, Nürtingen, 8-11, September, 2013, Germany |
| Freie Schlagworte | Tilted-wave interferometer ; asphere metrology ; virtual experiment ; sensitivity analysis ; modeling of optical metrology systems |
| Zusammenfassung | Tilted-wave interferometry is a novel measurement technique for the high-accurate optical measurement of aspheres and freeform surfaces. The technique was recently proposed by the University of Stuttgart, and it combines interferometric measurements with ray tracing and math-based reconstruction procedures. Main advantages of this novel technique are its potential to provide high-accurate measurements of steep aspheres and its short measurement times. The tilted-wave interferometer is working in the non-null measurement fashion. Several test beams with different tilts are used, and the surface of the specimen under test is reconstructed from the observed optical path length differences. Due to the non-null measurement fashion, a correct separation of the real surface topography from systematic aberrations is necessary. Therefore, the employed interferometer needs to be characterized in advance. In this work, we investigate the stability and the sensitivity of the math-based reconstruction procedure of the tilted-wave Interferometer. To this end we utilize a simulation environment that was developed at PTB for assessing optical measuring systems. The simulation environment allows for ray tracing, a flexible choice of the employed optical surfaces, and positioning of all optical components of the interferometer as well as the specimen under test. The virtual experiments were carried out by specifying the optical surfaces of the tilted-wave interferometer, the specimen under test (diameter up to 46 mm, radius up to 34 mm, asphericity of several 100 µm) as well as the employed point sources. The resulting interferometer measurements were then determined by the simulation environment using ray tracing. Finally, these interferometer measurements were distorted by noise to emulate realistic measurement conditions. The simulated measurements were then analyzed to produce an estimate of the specimen’s surface. The reconstruction errors of the resulting estimate for the specimen’s surface were then systematically investigated in dependence on the variation of the specimen’s topography and the measurement noise. Different variations of the specimen’s topography with different spatial frequencies were studied. Throughout all simulations no errors in the characterization of the tilted-wave interferometer were assumed to be present which corresponds to a perfect calibration. In this work we describe the simulation environment and the results obtained by its application for a sensitivity analysis of the tilted-wave interferometer. We present the results of extensive numerical simulations which appear to support the tilted-wave interferometer as a promising optical technique for the high-accurate measurement of aspheres and freeform surfaces. |
Zitierung
Fortmeier, I., Stavridis, M., Wiegmann, A., Schulz, M., Baer, G., Pruss, C., Osten, W., & Elster, C. (2014). Results of a sensitivity analysis for the tilted-wave interferometer [poster]. Fringe 2013 - 7. International Workshop on Advanced Optical Imaging and Metrology, Nürtingen, 8-11, September, 2013, Germany. https://doi.org/10.1007/978-3-642-36359-7