| Zugriffsnummer | 29356 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | The effect of line roughness on DUV scatterometry |
| Autor(in); Institution |
Henn, Mark-Alexander; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Heidenreich, Sebastian; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Gross, Hermann; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bär, Markus; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Modeling Aspects in Optical Metrology IV:(2013), 1 - 6 |
| Artikelnummer | 87890U |
| Schriftenreihe | Proceedings of SPIE: 8789 |
| Availability | [CD-ROM] ; file name: 8789_30.pdf |
| Herausgeber(in) |
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| ISBN | 978-0-8194-9605-8 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology IV, Munich, 13-14, May, 2013, Germany |
| Freie Schlagworte | Scatterometry ; Optical metrology ; Line edge roughness |
| Zusammenfassung | The impact of line-edge (LER) and line-width roughness (LWR) on the measured diffraction patters in extreme ultraviolet (EUV) scatterometry has been investigated in recent publications. Two-dimensional rigorous numerical simulations were carried out to model roughness. Simple analytical expressions for the bias in the mean efficiencies stemming from LER and LWR were obtained. Applying a similar approach for DUV scatterometry to investigate the impact of line roughness we obtain comparable results. |
Zitierung
Henn, M.-A., Heidenreich, S., Gross, H., Bodermann, B., & Bär, M. (2013). The effect of line roughness on DUV scatterometry. SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology IV, Munich, 13-14, May, 2013, Germany. https://doi.org/10.1117/12.2020761