| Zugriffsnummer | 29311 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Very fast-opening UHV gate valve |
| Autor(in); Institution |
Sonderegger, Kurt; VAT, Haag, SWITZERLAND
Dür, Michael; VAT, Haag, SWITZERLAND
Buthig, Joachim; 7.5, Wärme und Vakuum, PTB-Berlin
Pantazis, Sarantis; 7.5, Wärme und Vakuum, PTB-Berlin
Jousten, Karl; 7.5, Wärme und Vakuum, PTB-Berlin
|
| Quelle/Jahr | Journal of Vacuum Science and Technology A: 31 (2013), 6, 3 S. |
| ISSN | 0734-2101 |
| DOI | |
| Verlag | New York, NY: American Vacuum Society |
| Freie Schlagworte | cameras ; high-speed optical techniques ; vacuum control ; valves |
| Zusammenfassung | In industry there are many fast processes that require rapid changes of pressure in the vacuum regime, e.g. leak testing, CD metallization, or coating processes. Typically, vacuum load locks are used for such processes, where the pressure changes from atmospheric pressure to medium vacuum within 1 s or less. The control of such vacuum systems is triggered by vacuum gauge readings. Vacuum gauge manufacturers are interested in knowing how fast their gauges can follow such rapid changes of pressure. To investigate the response time of vacuum gauges to rapid pressure changes, in the framework of the European project EMRP IND12, the Physikalisch-Technische Bundesanstalt (PTB) is developing a dynamic pressure standard, where the pressure changes in a predictable manner from 100 kPa to 100 Pa within one second or less. This shall be accomplished by the expansion of gas from a volume of about 0.1 L via a calculable conductance of about 1 L/s. To start the expansion process, a fast-opening valve is needed which exhibits a much larger conductance than the calculable one. The opening time should be less than 10 ms. To this end, the VAT company with its extensive experience of fast-closing valves developed a very fast-opening DN40CF gate valve which exhibits a conductance in the molecular flow regime of 67 L/s (nitrogen, 20°C). After delivery of the valve, its opening time was tested by PTB. |
