| Zugriffsnummer | 29082 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Blu-ray laser system for light exposure of photoresists on three dimensional surfaces [poster] |
| Autor(in); Institution |
Schmaljohann, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Hagedorn, Daniel; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology: 2 (2013), 344 - 347 |
| Herausgeber(in) |
Leach, R.
|
| ISBN | 978-0-9566790-2-4 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 13th International Conference of the european society for precision engineering and nanotechnology, Berlin, 27-31, May, 2013, Germany |
| Freie Schlagworte | microstructures ; laser photolithography ; blu-ray laser ; microfabrication ; thin-film sensors |
| Zusammenfassung | For the microstructuring of thin films by photolithographic means, a laser system for light exposure, utilising a highly precise four axis kinematics was developed. The system is part of PTBs modular microfabrication facilities and, therefore, a further stage of development of the units presented in the past [2-4]. The structures obtainable have a minimum width of a few ten micrometre, e.g. for the primarily intended use as a directly sputtered thin-film sensor. The wavelength of the laser system has to meet the requirements of the photoresist. Therefore, a low priced blu-ray laser diode (wavelength: 405 nm) was installed. For the intended application, a great variety of workpieces need to be handled. [1] F. Schmaljohann, D. Hagedorn, A. Buß, R. Kumme, L. Löffler: Thin-film sensors with small structure size on flat and curved surfaces, Measurement Science and Technology: 23 (2012), 7, 074017, http://dx.doi.org/10.1088/0957-0233/23/7/074019 [2] F. Löffler: Design of a small precision lathe, Euspen international conference on precision engineering, micro technology, measurement techniques and equipment : proceedings. Vol. 1: (2003), 81 - 84 [3] F. Löffler, R. Meeß, H.-P. Heyne, G. Hinzmann, J. Rother: Production of round profiled microgrooves in monocrystalline silicon, Proceedings of the 4th euspen International Conference: May 31st - June 2nd 2004, Glasgow, Scotland, UK (2004), 103 - 104 [4] R. Meeß, F. Löffler: Design of a precision micro-assembly device with 6 degree of freedom, Proceedings of the 6th international conference, European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna. Vol. 2 (2006), 64 - 67 |
Zitierung
Schmaljohann, F., Meeß, R., Hagedorn, D., & Löffler, F. (2013). Blu-ray laser system for light exposure of photoresists on three dimensional surfaces [poster]. 13th International Conference of the european society for precision engineering and nanotechnology, Berlin, 27-31, May, 2013, Germany.