| Zugriffsnummer | 28604 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Experimental validation of the Extended-Nijboer-Zernike (ENZ) based aberration retrieval method for microscope objectives |
| Autor(in); Institution |
Wiegmann, Axel; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Haver, Sven van; TU Delft, Optics Research Group, Delft, THE NETHERLANDS
Kumar, Nitish; TU Delft, Optics Research Group, Delft, THE NETHERLANDS
Pereira, Silvania F.; TU Delft, Optics Research Group, Delft, THE NETHERLANDS
|
| Quelle/Jahr | DGaO-Proceedings: 113 (2012) |
| Availability | [Online only] |
| ISSN | 1614-8436 |
| Persistent Identifier | |
| URL | |
| Verlag | Erlangen: Deutsche Gesellschaft für angewandte Optik |
| Konferenzangaben | 113. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Eindhoven, 29, Mai - 02, Juni, 2012, Niederlande |
| Freie Schlagworte | Deflectometry ; Flatness measurement ; Granite flatness |
| Zusammenfassung | The wavefront in the exit pupil of a microscope objective (NA=0.4) is obtained with a phase retrieval method based on the ENZ theory. The ENZ method calculates the wavefront from measured intensity distributions of through-focus planes. Comparison of this method with a direct interferometric method shows an agreement better than λ/70 (rms) for relative wavefront measurements. |
Zitierung
Wiegmann, A., Haver, S. V., Kumar, N., & Pereira, S. F. (2012). Experimental validation of the Extended-Nijboer-Zernike (ENZ) based aberration retrieval method for microscope objectives. 113. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Eindhoven, 29, Mai - 02, Juni, 2012, Niederlande.