| Zugriffsnummer | 28412 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates |
| Autor(in); Institution |
Rohland, Martina; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Arz, Uwe; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Kuhlmann, Karsten; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Büttgenbach, Stephanus; TU Braunschweig, Institut für Mikrotechnik, Braunschweig, GERMANY
|
| Quelle/Jahr | Kleinheubacher Berichte 2011. Advances in Radio Science: 10 (2012), 13 - 28 |
| Availability | [online only] |
| ISSN | 1684-9973 |
| URL | |
| Verlag | Göttingen: Copernicus Publications |
| Zusammenfassung | We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than −10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 3.0 ; Creative Commons Attribution 3.0 License |