| Zugriffsnummer | 28050 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Reduction of the residual flatness in confocal microscopes |
| Autor(in); Institution |
Krüger-Sehm, Rolf; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Fabich, M.; Olympus Life Science Europe, GERMANY
|
| Quelle/Jahr | Proceedings ofthe Third International Conference on Surface Metrology:(2012) |
| Availability | [Electronic version] |
| Konferenzangaben | International Conference on Surface Metrology, Annecy, 21-23, March, 2012, France |
| Freie Schlagworte | Confocal Microscope ; Residual Flatness ; Calibration |
| Zusammenfassung | The capability, to measure the height of features is an essential task for all surface topography measuring instruments. The smaller the heights are the more severe is the influence of the areal reference on the result. In confocal microscopes the topography of this metrological characteristic is measured and stored by the manufacturer and subtracted from the consecutive user’s measurements. To consider variations of the initial reference topography derived by mechanical stability, thermal and optical influences, the manufacturers specify rather conservatively the value of the residual flatness. In this article a method is described, which delivers the actual effective reference plane with better accuracy but indispensible limited lifetime of validity. The method reflects the procedure for the determination of the residual flatness in interference microscopes described in existing guidelines. Expectations of further use of this knowledge in applications software of instruments and in standards or guidelines will be given. |
