| Zugriffsnummer | 27838 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm |
| Autor(in); Institution |
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köchert, Paul; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Andreas, Birk; 4.3, Quantenoptik und Längeneinheit, PTB-Braunschweig
Kuetgens, Ulrich; 4.3, Quantenoptik und Längeneinheit, PTB-Braunschweig
Yacoot, A.; National Physical Laboratory (NPL), Teddington, UK
|
| Quelle/Jahr | Measurement Science and Technology: 23 (2012), 9, 094005-1 - 094005-7 |
| ISSN | 0957-0233 |
| DOI | |
| Verlag | Bristol: IOP |
| Konferenzangaben | MacroScale 2011, Conference on Recent Developments in Traceable Dimensional Measurements, Bern-Wabern, 04-06, October, 2011, Switzerland |
| Klassifikationscode | PACS: 07.60.Ly ; PACS: 84.30.Sk ; PACS: 06.30.Bp |
| Freie Schlagworte | heterodyne interferometer ; nonlinearity ; nonlinearity ; picometre ; optical fibres |
| Zusammenfassung | The PTB developed a new optical heterodyne interferometer in the context of the European joint research project "Nanotrace". A new optical concept using plane-parallel plates and spatially separated input beams to minimize the periodic nonlinearities was realized. Furthermore, the interferometer has the resolution of a double-path interferometer, compensates for possible angle variations between the mirrors and the interferometer optics and offers a minimal path difference between the reference and the measurement arm. Additionally, a new heterodyne phase evaluation based on an analogue to digital converter board with embedded field programmable gate arrays was developed, providing a high-resolving capability in the single-digit picometre range. The nonlinearities were characterized by a comparison with an x-ray interferometer, over a measurement range of 2.2 periods of the optical interferometer. Assuming an error-free x-ray interferometer, the nonlinearities are considered to be the deviation of the measured displacement from a best-fit line. For the proposed interferometer, nonlinearities smaller than ±10 pm were observed without any quadrature fringe correction. |
Zitierung
Weichert, C., Köchert, P., Köning, R., Flügge, J., Andreas, B., Kuetgens, U., & Yacoot, A. (2012). A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm. Measurement Science and Technology, 23(9), 094005-1–094005-7. https://doi.org/10.1088/0957-0233/23/9/094005