| Zugriffsnummer | 27770 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Relations between different definitions of optical resolution |
| Autor(in); Institution |
Krüger-Sehm, Rolf; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Fabich, M.; Olympus Life Science Europe, GERMANY
|
| Quelle/Jahr | Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology: 1 (2012), 272 - 275 |
| Herausgeber(in) |
Shore, Paul
|
| ISBN | 978-0-9566790-0-0 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | EUSPEN International Conference, Stockholm, 04-08, June, 2012, Sweden |
| Zusammenfassung | The capability to measure the height of small scale features is an essential metrological task of all surface topography measuring instruments. Starting with the Rayleigh definition of resolution as smallest distance of features distinguishable because of their intensity contrast, a model is developed that describes the smallest feature width, whose height is measured correctly. The advantage of this description is the close relationship to the resolution definition for contact stylus instruments in ISO 25178-601 named "width limit if full height transmission". The model is verified with a confocal microscope by measurements of chromium-glass resolution patterns in relation to topographical resolution patterns etched in silicon. The intention of this article is to make plain, that in view of upcoming ISO 25178-600 series the described method is one potentially beside a variety of other definitions of resolution each with good cause. |
