| Zugriffsnummer | 27752 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Dimensional nanometrology at PTB |
| Autor(in); Institution |
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Dai, Gaoliang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bütefisch, Sebastian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | 2012 IEEE International Instrumentation and Measurement Technology Conference I2MTC proceedings:(2012), 898 - 901 |
| ISBN | 978-1-4577-1771-0 ; 978-1-4577-1773-4 ; 978-1-4577-1772-7 |
| DOI | |
| Verlag | Piscataway, NJ: IEEE Service Center |
| Konferenzangaben | 2012 IEEE I2MTC International Instrumentation and Measurement Technology Conference, Graz, 13-16, May, 2012, Austria |
| Freie Schlagworte | nanometrology ; micrometrology ; Scanning Probe Microscopy (SPM) ; Atomic Force Microscopy (AFM) ; Scanning Electron Microscopy (SEM) ; coordinate metrology ; Coordinate Measuring Machines (CMM) ; critical dimensions ; calibration |
| Zusammenfassung | Dimensional metrology for micro- and even nanometer-sized objects is becoming increasingly important in industry branches like semiconductor and optical industries as well as in the fields of mechanical engineering, biology and medicine. To achieve the required small uncertainties and probing flexibility new measurement systems have been developed in the recent years. This paper introduces some dimensional metrology research activities at PTB. A metrological large range AFM with a capable measurement volume of 25 mm x 25 mm x 5 mm is introduced for versatile measurements of micro-/nanostructures. A special assembled cantilever probe (ACP) which is applicable for direct and non-destructive sidewall measurements is presented. Furthermore, a true 3D AFM using flared AFM probes is described. Finally, the challenges in form metrology are discussed and an ultra precision CMM applicable for form measurements are introduced. |
Zitierung
Danzebrink, H.-U., Dai, G., Pohlenz, F., Dziomba, T., Bütefisch, S., Flügge, J., & Bosse, H. (2012). Dimensional nanometrology at PTB. 2012 IEEE I2MTC International Instrumentation and Measurement Technology Conference, Graz, 13-16, May, 2012, Austria. https://doi.org/10.1109/i2mtc.2012.6229183