| Zugriffsnummer | 27697 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Comparison of the performance of the next generation of optical interferometers |
| Autor(in); Institution |
Pisani, Marco; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Yacoot, Andrew; National Physical Laboratory (NPL), Teddington, UK
Balling, Petr; Czech Metrology Institute (CMI), Prague, CZECH REPUBLIC
Bancone, Nicola; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Birlikseven, Cengiz; TÜBİ TAK, Ulusal Metroloji Enstitüsü (UME), Gebze-Kocaeli, TURKEY
Celik, Mehmet; TÜBİ TAK, Ulusal Metroloji Enstitüsü (UME), Gebze-Kocaeli, TURKEY
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Hamid, Ramiz; TÜBİ TAK, Ulusal Metroloji Enstitüsü (UME), Gebze-Kocaeli, TURKEY
Köchert, Paul; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Kren, Petr; Czech Metrology Institute (CMI), Prague, CZECH REPUBLIC
Kuetgens, Ulrich; 4.3, Quantenoptik und Längeneinheit, PTB-Braunschweig
Lassila, Antti; Centre for Metrology and Accreditation (MIKES), Espoo, FINLAND
Picotto, Gian Bartolo; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Sahin, Ersoy; TÜBİ TAK, Ulusal Metroloji Enstitüsü (UME), Gebze-Kocaeli, TURKEY
Seppä, Jeremias; Centre for Metrology and Accreditation (MIKES), Espoo, FINLAND
Tedaldi, Matthew; National Physical Laboratory (NPL), Teddington, UK
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Metrologia: 49 (2012), 4, 455 - 467 |
| ISSN | 0026-1394 |
| DOI | |
| Verlag | Bristol: IOP Publ. |
| Klassifikationscode | PACS: 07.60.Ly ; PACS: 06.20.Jr ; PACS: 06.30.Bp |
| Freie Schlagworte | optical interferometer comparison ; x-ray interferometer |
| Zusammenfassung | Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements. |
Zitierung
Pisani, M., Yacoot, A., Balling, P., Bancone, N., Birlikseven, C., Celik, M., Flügge, J., Hamid, R., Köchert, P., Kren, P., Kuetgens, U., Lassila, A., Picotto, G. B., Sahin, E., Seppä, J., Tedaldi, M., & Weichert, C. (2012). Comparison of the performance of the next generation of optical interferometers. Metrologia, 49(4), 455–467. https://doi.org/10.1088/0026-1394/49/4/455