| Zugriffsnummer | 27474 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Reliable quantification of inorganic contamination by TXRF |
| Autor(in); Institution |
Müller, Matthias; 7.2, Kryophysik und Spektrometrie, PTB-Berlin
Nutsch, Andreas; Fraunhofer IISB, Erlangen, GERMANY
Altmann, R.; Fraunhofer IISB, Erlangen, GERMANY
Borionetti, G.; MEMC Electronic Materials SpA, Novara, ITALY
Holz, Thomas; AXO DRESDEN GmbH, Heidenau, GERMANY
Mantler, Claus; Siltronic AG, Freiberg, GERMANY
Hönicke, Philipp; 7.2, Kryophysik und Spektrometrie, PTB-Berlin
Kolbe, Michael; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Beckhoff, Burkhard; 7.2, Kryophysik und Spektrometrie, PTB-Berlin
|
| Quelle/Jahr | Ultra Clean Processing of Semiconductor Surfaces X. Solid State Phenomena: 187 (2012), 291 - 294 |
| Herausgeber(in) |
Mertens, Paul
Meuris, Marc
Heyns, Marc
|
| ISSN | 1012-0394 (PRINT) ; 1662-9779 (ONLINE) |
| DOI | |
| Verlag | Zürich: Trans Tech Publications |
| Konferenzangaben | 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS 2010, Ostende, 20-22, September, 2010, Belgium |
| Freie Schlagworte | TXRF analysis ; calibration ; TXRF quantification ; inorganic surface contamination |
| Zusammenfassung | The European Integrated Activity of Excellence and Networking for Nano- and Micro-Electronics Analysis (ANNA), www.ANNA-i3.net, has addressed the further development and assessment of methodologies for the detection of low concentration inorganic contaminants on and in silicon as well as for novel materials. The comparison of various analytical techniques available to the ANNA partners helped to identify the degree of comparableness of results revealed at different installations. The assessment of improved methodologies as well as the reliability of quantification and calibration procedures of specific analytical techniques such as Total-Reflection X-ray Fluorescence (TXRF) analysis has been of particular interest. |
Zitierung
Müller, M., Nutsch, A., Altmann, R., Borionetti, G., Holz, T., Mantler, C., Hönicke, P., Kolbe, M., & Beckhoff, B. (2012). Reliable quantification of inorganic contamination by TXRF. Solid State Phenomena, 187, 291–294. https://doi.org/10.4028/www.scientific.net/ssp.187.291