| Zugriffsnummer | 27339 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Experimental setup of an ultra-precision interference comparator using scanning tunneling microscopes as sensor elements |
| Autor(in); Institution |
Waltereit, Elmar; 5.12, Mikrotopographie, PTB-Braunschweig
Harms, Christian; 5.12, Mikrotopographie, PTB-Braunschweig
Koenders, Ludger; 5.12, Mikrotopographie, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
Büttgenbach, S.; TU Braunschweig, Braunschweig, GERMANY
|
| Quelle/Jahr | Progress in precision engineering and nanotechnology : proceedings of the 9th International Precision Engineering Seminar, 4th International Conference on Ultraprecision in Manufacturing Engineering. Vol. 2:(1997), 733 - 737 |
| Herausgeber(in) |
Kunzmann, Horst; 5, Fertigungsmeßtechnik, PTB-Braunschweig
Wäldele, Franz; 5.3, Koordinatenmeßtechnik und Meßgerätebau, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-9801433-9-2 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany |
| Zusammenfassung | A novel procedure is presented which can be applied to determine the thickness of gauge blocks. Length measurement is based on an interferometer, the surface is scanned with the aid of a scanning tunneling microscope (STM). The local topography of the gauge block can be determined separately. The uncertainty measurement should not exceed 5 nm. |
Zitierung
Waltereit, E., Harms, C., Koenders, L., Wilkening, G., & Büttgenbach, S. (1997). Experimental setup of an ultra-precision interference comparator using scanning tunneling microscopes as sensor elements. 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany.