| Zugriffsnummer | 27337 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Manufacturing and metrological properties of ultrafine roughness standards with irregular profiles |
| Autor(in); Institution |
Jäger, Valentin; 5.34, Mechanischer Gerätebau, PTB-Braunschweig
Krüger, Rolf; 5.12, Mikrotopographie, PTB-Braunschweig
|
| Quelle/Jahr | Progress in precision engineering and nanotechnology : proceedings of the 9th International Precision Engineering Seminar, 4th International Conference on Ultraprecision in Manufacturing Engineering. Vol. 2:(1997), 544 - 547 |
| Herausgeber(in) |
Kunzmann, Horst; 5, Fertigungsmeßtechnik, PTB-Braunschweig
Wäldele, Franz; 5.3, Koordinatenmeßtechnik und Meßgerätebau, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-9801433-9-2 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany |
| Zusammenfassung | Many applications in science and industry call for surface roughness standards with values below those in current use. New ultrafine surface roughness standards with an irregular profile developed for the nanometer range can be manufactured using modern production technologies. They are designed primarily for the calibration of contact stylus instruments but can also be used for calibrating interference microscopes. Manufacturing the standards and results of topographic measurements with interference microscopes are described. |
Zitierung
Jäger, V. & Krüger, R. (1997). Manufacturing and metrological properties of ultrafine roughness standards with irregular profiles. 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany.