| Zugriffsnummer | 27331 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Preparation of cross-sections for measuring the thickness of coatings |
| Autor(in); Institution |
Hoffmann, Klaus-Peter; 5.21, Härte und Schichtdicke, PTB-Braunschweig
|
| Quelle/Jahr | Progress in precision engineering and nanotechnology : proceedings of the 9th International Precision Engineering Seminar, 4th International Conference on Ultraprecision in Manufacturing Engineering. Vol. 1:(1997), 191 - 193 |
| Herausgeber(in) |
Kunzmann, Horst; 5, Fertigungsmeßtechnik, PTB-Braunschweig
Wäldele, Franz; 5.3, Koordinatenmeßtechnik und Meßgerätebau, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-9801433-9-2 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany |
| Zusammenfassung | The lateral measurement of the thickness of coatings by scanning electron microscopy assumes a cross-section through the coating structure. The surface of the cross-section must show clearly defined and undisturbed interfaces of the regions consisting of different materials. Methods for the preparation of cross-sections using the ion beam technique are demonstrated. |
Zitierung
Hoffmann, K.-P. (1997). Preparation of cross-sections for measuring the thickness of coatings. 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany.