| Zugriffsnummer | 27329 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Investigations into the coupling of interferometer reflectors with material measures on lengths comparators |
| Autor(in); Institution |
Pieles, Herbert; 5.22, Längen- und Winkelteilungen, PTB-Braunschweig
Tschirnich, Josef; 5.22, Längen- und Winkelteilungen, PTB-Braunschweig
|
| Quelle/Jahr | Progress in precision engineering and nanotechnology : proceedings of the 9th International Precision Engineering Seminar, 4th International Conference on Ultraprecision in Manufacturing Engineering. Vol. 1:(1997), 175 - 177 |
| Herausgeber(in) |
Kunzmann, Horst; 5, Fertigungsmeßtechnik, PTB-Braunschweig
Wäldele, Franz; 5.3, Koordinatenmeßtechnik und Meßgerätebau, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-9801433-9-2 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany |
| Zusammenfassung | In the context with precise length measurements, it is necessary to investigate the influence of coupling effects between measuring reflector of the interferometer and object to be measured. Therefore measurements were carried out for a particular variant of coupling on a length comparator. Corresponding measurement errors were detected. Use of different high resolving length and angle sensors make it possible to correct such measuring errors within the range of the overall uncertainty of the length comparator. |
Zitierung
Pieles, H. & Tschirnich, J. (1997). Investigations into the coupling of interferometer reflectors with material measures on lengths comparators. 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany.