| Zugriffsnummer | 27324 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Measurement of the thickness coatings using a modified scanning electron microscope |
| Autor(in); Institution |
Ahbe, Thomas; 5.21, Härte und Schichtdicke, PTB-Braunschweig
Haft, Norbert; 5.21, Härte und Schichtdicke, PTB-Braunschweig
Hoffmann, Klaus-Peter; 5.21, Härte und Schichtdicke, PTB-Braunschweig
|
| Quelle/Jahr | Progress in precision engineering and nanotechnology : proceedings of the 9th International Precision Engineering Seminar, 4th International Conference on Ultraprecision in Manufacturing Engineering. Vol. 1:(1997), 98 - 100 |
| Herausgeber(in) |
Kunzmann, Horst; 5, Fertigungsmeßtechnik, PTB-Braunschweig
Wäldele, Franz; 5.3, Koordinatenmeßtechnik und Meßgerätebau, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
|
| ISBN | 3-9801433-9-2 |
| Verlag | Braunschweig: Physikalisch-Technische Bundesanstalt |
| Konferenzangaben | 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany |
| Zusammenfassung | A field emission scanning electron microscope (FE SEM) was modified to measure the thickness of coatings on cross-sections of artefacts consisting of substrate, coating(s) which is (are) of interest and an additional protective layer. Inside the chamber of the SEM, on top of the standard specimen stage, a piezo-driven monolithic stage for one-dimensional movement and a capacitive sensor have been mounted in order to move the sample and to measure its displacement. A measurement is carried out by a combined electron-beam and object scan. First results show that this method is suitable for measurements of the thickness of coatings traceable to national length standards. |
Zitierung
Ahbe, T., Haft, N., & Hoffmann, K.-P. (1997). Measurement of the thickness coatings using a modified scanning electron microscope. 9th International Precision Engineering Seminar (IPES) and 4th International Conference on Ultraprecision in Manufacturing Engineering (UME), Braunschweig, 26-30, May, 1997, Germany.