| Zugriffsnummer | 27313 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | A novel surface topography sensor in the nm range based on a non-counting diode laser interferometer |
| Autor(in); Institution |
Abou-Zeid, Ahmed; 5.101, Wellenlängenstabilisierung von Diodenlasern für die Längenmeßtechnik, PTB-Braunschweig
Wiese, Peter; 5.101, Wellenlängenstabilisierung von Diodenlasern für die Längenmeßtechnik, PTB-Braunschweig
|
| Quelle/Jahr | International progress in precision engineering : proceedings of the 7th International Precision Engineering Seminar:(1993), 518 - 529 |
| Herausgeber(in) |
Ikawa, Naoya
|
| ISBN | 0-7506-9484-X |
| Verlag | Boston [u.a.]: Butterworth-Heinemann |
| Konferenzangaben | 7th International Precision Engineering Seminar - IPES 7, Kobe, May, 1993, Japan |
| Zusammenfassung | The diode laser is a compact, cheap and high emission power light source whose use in the interferometers is impeded by spectral aging and the strong dependence of the wavelength on the diode parameters: temperature and current. In this paper, a non-counting interferometric method will be presented, which does not depend on the exact value of the wavelength λ but on the coefficient dλ/di. This method profits from the possibility of tuning the wavelength of a temperature-stabilized diode laser over its current i. The resolution is determined by the difference of lengths of the interferometer arms and extends into the subnanometer range. As a first application, a prototype of a compact sensor to investigate surface topographies was set up and tested in comparison to other optical methods. |
