| Zugriffsnummer | 26926 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | High precision dimensional metrology of periodic nanostructures using laser scatteromery |
| Autor(in); Institution |
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bonifer, Stefanie; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Buhr, Egbert; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Diener, Alexander; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Wurm, Matthias; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | 10th IMEKO Symposium Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI) 2011:(2011), 217 - 222 |
| Schriftenreihe | VDI-Berichte: 2156 |
| ISBN | 978-3-18-092156-3 |
| Verlag | Düsseldorf: VDI-Verl. |
| Konferenzangaben | 10th IMEKO Symposium LMPMI (Laser Metrology for Precision Measurement and Inspection in Industry), Braunschweig, 12-13, September, 2011, Germany |
| Zusammenfassung | At PTB different laser scatterometers with partly novel and outstanding metrological capabilities have been developed and are available for high-resolution dimensional metrology of periodic nanostructures. Two different systems are described and their metrological potential discussed: a laser diffractometer for pitch calibration and a versatile goniometric scatterometer for multi-parameter characterisation of nanostructures. |
Zitierung
Bodermann, B., Bonifer, S., Buhr, E., Diener, A., & Wurm, M. (2011). High precision dimensional metrology of periodic nanostructures using laser scatteromery. 10th IMEKO Symposium LMPMI (Laser Metrology for Precision Measurement and Inspection in Industry), Braunschweig, 12-13, September, 2011, Germany.