| Zugriffsnummer | 26684 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Compact field programmable gate array (FPGA)-based multiaxial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range |
| Autor(in); Institution |
Strube, Sebastian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Molnar, Gabor; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 22 (2011), 9, 094026-1 - 094026-8 |
| ISSN | 0957-0233 |
| DOI | |
| URL | |
| Verlag | Bristol: IOP Publ. |
| Konferenzangaben | 5th Seminar on Nanoscale Calibration Standards and Methods and the 9th Seminar on Quantitative Microscopy, Brno, 27-29, October, 2010, Czech Republic |
| Klassifikationscode | PACS: 84.30.Sk ; PACS: 07.07.Df ; PACS: 07.05.Dz ; PACS: 06.20.fb ; PACS: 06.60.Sx ; PACS: 06.30.Bp |
| Freie Schlagworte | interferometry ; Twyman-Green interferometer ; nano metrology ; scanning force microscopy ; scanning probe microscopy ; atomic force microscopy ; SFM ; SPM ; AFM ; FPGA ; tilt measurement ; distance measurement |
| Zusammenfassung | Quantitative determination of micro- and nanostructure properties is essential in research, development and in the production process control. In instruments for nanometrology the positioning stage is the key component, since the characteristics of the position acquisition and control determine directly the achievable precision of the complete system. Commercial systems usually employ capacitive or inductive position sensors. Both technologies offer a resolution in the nanometre range, but also require a (periodical) calibration. To achieve traceable measurements interferometric sensors need to be implemented into the metrology system. However, currently available commercial interferometers turned out to be too large to be installed in miniature positioning stages easily. Therefore a new highly compact interferometer to allow for traceability and an uncertainty in the Ångstrom range was developed. One of its first applications will be the new metrological low-noise AFM at PTB. The new interferometer is based on a modified homodyne Twyman-Green interferometer concept. It uses a novel signal processing approach based on a field programmable gate array (FPGA), whereby a spatial interferogram is acquired by a high-speed CMOS line sensor and transformed into its frequency spectrum through a discrete Fourier transform. The spectral representation is analyzed for its major components; the phase information bears a direct connection to the displacement of the positioning unit. Furthermore a possible stage tilt during the scan gives rise to a shift of the peak magnitude in the frequency spectrum. The developed system also proved to be easily extendable to multiple axes by superimposing multiple interferograms on a single line sensor. |
Zitierung
Strube, S., Molnar, G., & Danzebrink, H.-U. (2011). Compact field programmable gate array (FPGA)-based multiaxial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range. Measurement Science and Technology, 22(9), 094026-1–094026-8. https://doi.org/10.1088/0957-0233/22/9/094026