| Zugriffsnummer | 26570 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Sensors for optical 3D measurements of micro geometries |
| Autor(in); Institution |
Bremer, Holger; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Neuschaefer-Rube, Ulrich; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Birth, Thomas; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Reflecting on the past - looking into the future : NCSL International, workshop & symposium ; [workshop proceedings]:(2011), 11 S. |
| Availability | [CD-ROM] ; file name: data\\papers\\Bremer_202.pdf |
| ISBN | 1-58464-066-9 |
| Verlag | Boulder, Colo.: NCSL International |
| Konferenzangaben | NCSL International 2011, National Harbor, MD, 21-25, August, 2011, USA |
| Zusammenfassung | The paper will give an overview of some of the optical measurement techniques used in laboratories as well as close to the production line. The principle of white light interferometry, focus variation, fringe projection, confocal microscopy, and image processing will be addressed. Further, typical application examples will be given and their benefits and limitations discussed. |
