| Zugriffsnummer | 26568 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Traceable measurement of nanoparticle size using a scanning electron microscope in transmission mode (TSEM) |
| Autor(in); Institution |
Klein, Tobias; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Buhr, Egbert; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Johnsen, Klaus-Peter; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Frase, Carl Georg; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 22 (2011), 9, 094002-1 - 094002-9 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publ. |
| Konferenzangaben | 5th Seminar on Nanoscale Calibration Standards and Methods and the 9th Seminar on Quantitative Microscopy, Brno, 27-29, October, 2010, Czech Republic |
| Klassifikationscode | PACS: 07.78.+s ; PACS: 06.20.fb ; PACS: 61.46.Df ; PACS: 07.05.Pj |
| Freie Schlagworte | nanoparticle size ; TSEM ; Monte Carlo simulation ; image analysis ; STEM-in-SEM |
| Zusammenfassung | Traceable size measurements of nanoparticles are accomplished by means of a calibrated scanning electron microscope operated in transmission mode (TSEM). An image analysis tool was developed which individually determines the boundary and size of every particle based on modelled TSEM signals obtained by Monte Carlo simulations. The model relies on first-principle electron scattering theory taking into account particle and instrument properties. A series of TSEM images containing thousands of particles can be analysed in automated batch processing to attain a particle size distribution. As examples, nanoparticles of three different material classes (gold, silica, latex) with sizes ranging from about 5 to 60 nm are analysed. An uncertainty analysis reveals expanded measurement uncertainties (95% confidence interval) of the mean diameter in the range of 1 to 3 nm. |
Zitierung
Klein, T., Buhr, E., Johnsen, K.-P., & Frase, C. G. (2011). Traceable measurement of nanoparticle size using a scanning electron microscope in transmission mode (TSEM). Measurement Science and Technology, 22(9), 094002-1–094002-9. https://doi.org/10.1088/0957-0233/22/9/094002