| Zugriffsnummer | 26169 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Flatness measurements with the deflectometric flatness reference at PTB |
| Autor(in); Institution |
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Wiegmann, Axel; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology: 1 (2011), 154 - 157 |
| Herausgeber(in) |
Spaan, Henny
|
| ISBN | 978-0-9553082-9-1 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 11th International Conference of the European Society for Precision Engineering and Nanotechnology, Como, 23-27, May, 2011, Italy |
| Zusammenfassung | Recently, a new flatness measuring system for specimens with dimensions of up to 1 m and masses of up to 120 kg has been realised at PTB. The system, called Deflectometric Flatness Reference (DFR), consists of two sub-systems for specimens in horizontal or vertical orientation, which measures the slopes of the surfaces under test and determine from this the surface topography. The angular measurement is performed by applying a highly accurate autocollimator and a double mirror unit (DMU), which is moved along the surface under test and, thus, sans sections of the surface. The design of the instrument is based on error estimations by a simulation environment for measuring machines developed at PTB using the machine's performance data. From the results, a topography measurement uncertainty in the sub nanometre range can be deduced. Essential for this low uncertainty is the quality of the DMU. The manufacturing and the adjustment of the DMU is presented. With the new DFR system being built up, first measurements have been performed and an example will be presented. |
Zitierung
Ehret, G., Schulz, M., Wiegmann, A., Stavridis, M., & Elster, C. (2011). Flatness measurements with the deflectometric flatness reference at PTB. 11th International Conference of the European Society for Precision Engineering and Nanotechnology, Como, 23-27, May, 2011, Italy.