| Zugriffsnummer | 26125 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Alignment methods for ultraprecise deflectometric flatness metrology |
| Autor(in); Institution |
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Fitzenreiter, Arne; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Baier, Maik; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Joeckel, Wolfgang; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Optical Measurement Systems for Industrial Inspection VII:(2011), 808213-1 - 808213-8 |
| Schriftenreihe | Proceedings of SPIE: 8082 |
| Herausgeber(in) |
Lehmann, Peter H.
|
| ISBN | 978-0-8194-8678-3 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE International Symposium Optical Metrology, Munich, 23-26, May, 2011, Germany |
| Freie Schlagworte | Optical flatness measurement ; Scanning deflectometry ; Topography measurement ; Virtual experiments |
| Zusammenfassung | At the Physikalisch-Technische Bundesanstalt (PTB) two new scanning deflectometric systems (Deflectometric Flatness Reference: DFR) were installed for measuring topographies of nearly flat surfaces with sub-nanometre uncertainty. The two systems can measure the form of horizontally and vertically orientated specimens with a diameter of up to 700 mm. The systems are based on different deflectometric procedures, the so-called direct and the difference deflectometry. With the flatness measuring systems, an uncertainty down to 0.1 nm (depending on the specimen and its peak-to-valley) is being aimed at for the 95% coverage interval. Virtual experiments show that the optical and mechanical components must be aligned in the arcsecond range in order to achieve errors for the topography in the sub-nanometre range. In this paper we describe the setup of the new DFR system for horizontally orientated specimens in detail and show methods and experimental results for an accurate alignment of the optical and mechanical components. We present an accurate alignment strategy for ultraprecise deflectometric measurements and show a measurement of a section at a horizontally orientated specimen. |
Zitierung
Ehret, G., Schulz, M., Fitzenreiter, A., Baier, M., Joeckel, W., Stavridis, M., & Elster, C. (2011). Alignment methods for ultraprecise deflectometric flatness metrology. SPIE International Symposium Optical Metrology, Munich, 23-26, May, 2011, Germany. https://doi.org/10.1117/12.889325