| Zugriffsnummer | 25836 |
| Dokumenttyp | Buch |
| Sprache | Englisch |
| Titel | European Workshops on "Critical Dimensions, Scanning Probe Techniques and Thin Film Metrology" |
| Quelle/Jahr | (2010), 128 S. |
| Herausgeber(in) |
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| ISBN | 978-0-9566809-7-6 |
| URL | |
| Verlag | Cranfield: Co-Nanomet Consortium |
| Konferenzangaben | European Workshops on Critical Dimensions, Scanning Probe Techniques and Thin Film Metrology, Brno, 28, October, 2010, Czech Republic |
| Freie Schlagworte | nano metrology ; Scanning Force Microscopy (SFM) ; scanning probe microscopy (SPM) ; atomic force microscopy (AFM) ; Scanning Electron Microscopy (SEM) ; critical dimensions |
| Zusammenfassung | Nanotechnology is now facing a growing demand for quantitative dimensional measurements to support the reliability, safety and competitiveness of products and services. Instrumentation and measurement techniques at the nanoscale play a crucial role not only in extending our knowledge of the properties of matter and processes in nanosciences, but also in addressing new measurement needs in process control and quality assurance in industry. The workshops detailed herein were organized as part of an European FP7 project “CO-NANOMET - Coordination of Nanometrology in Europe” by the European Nanometrology Action Groups (ENAGs) for Critical Dimensions and Scanning Probe Techniques and for Thin Films. The Co-Nanomet workshops were started by a lecture from Prof. Leslie Pendrill (Chair, EURAMET e.V.) about “Strategy for European national (nano)metrology in 2020” and accompanied by a Co-Nanomet stakeholder meeting. The latter included an introduction of the Co-Nanomet project by Dr. Theresa Burke and two presentations about the future trends and directions in the topics "Critical Dimensions and Scanning Probe Techniques" (Dr. Hans U. Danzebrink, PTB, Germany) and "Thin Films" (Dr. Gerald Williams, QinetiQ, United Kingdom). The aim of the workshops was to bring together developers, applicants and metrologists working on this field of nanometrology. The current status and future developments of the European and world-wide nanometrology were presented and discussed in several oral and poster sessions with regard to: - nanometer-scale dimensional metrology - traceability of dimensional measurements by standards - calibration of sensors related to force and their traceability - thin film metrology and measurement of other physical properties - future possibilities in surface analytics - concept of a strategy for an European nanometrology In this report we reflect the key presentations given at the workshops and give a summary of the main topics for a future framework for scanning probe microscopy and thin film measurements to improve European nanometrology. |
