| Zugriffsnummer | 25643 |
| Dokumenttyp | Bericht |
| Sprache | Englisch |
| Titel | Nanometrology foresight review |
| Autor(in); Institution |
Bosse, Harald; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Frase, Carl Georg; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Herrmann, Konrad; PTB-Braunschweig, retired staff
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Boyd, Robert; National Physical Laboratory (NPL), Teddington, UK
Cuenat, Alexandre; National Physical Laboratory (NPL), Teddington, UK
Gee, Mark; National Physical Laboratory (NPL), Teddington, UK
Leach, Richard; National Physical Laboratory (NPL), Teddington, UK
Yacoot, Andrew; National Physical Laboratory (NPL), Teddington, UK
Burke, Theresa; European Society for Precision Engineering and Nanotechnology (euspen), Cranfield, UK
Dirscherl, Kai; Danish Fundamental Metrology (DFM), Lyngby, DENMARK
Hansen, Poul-Erik; Danish Fundamental Metrology (DFM), Lyngby, DENMARK
Morazzani, Valerie; Laboratoire National de Métrologie et d’Essais (LNE), Trappes Cedex, FRANCE
Unger, Wolfgang; Federal Institute for Materials Research and Testing (BAM), Berlin, GERMANY
|
| Quelle/Jahr | (2010), 83 S. |
| Availability | [online] |
| Herausgeber(in) |
Burke, Theresa
|
| URL | |
| Verlag | Cranfield: Co-nanomet Consortium |
| Freie Schlagworte | nano metrology ; Scanning Force Microscopy (SFM) ; scanning probe microscopy (SPM) ; atomic force microscopy (AFM) ; Scanning Electron Microscopy (SEM) ; critical dimensions ; nanotechnology |
| Zusammenfassung | Nanotechnology offers large potential for applications and economic benefits that may contribute to the European economy. A worldwide race for progress in this field is underway, driving out enormous technological advances, and Europe currently holds a promising position in the field. Scientifically and economically, nanometrology is a critical underpinning activity supporting progress in nanotechnology, which must develop hand in hand with the developments of nanoscience and nanotechnology.The objective of this report is to provide a review of current nanometrology requirements and future strategies in support of the development of European nanotechnology.This review addresses the field of nanometrology through six discipline areas, namely: i) dimensional, ii) chemical, iii) biological, iv) mechanical, v) structured materials, and vi) electrical. Within each area, a review is provided of: current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging and/or current industrial measurement needs. As part of this review, a selection of national metrology institutes, both within Europe and worldwide, has been sampled to identify their existing nanometrology activities and strategies as well as future priorities. A total of nineteen European and eleven non-European countries were contacted and responses were received from twenty six countries. |
Zitierung
Bosse, H., Brand, U., Danzebrink, H.-U., Dziomba, T., Flügge, J., Frase, C. G., Herrmann, K., Koenders, L., Boyd, R., Cuenat, A., Gee, M., Leach, R., Yacoot, A., Burke, T., Dirscherl, K., Hansen, P.-E., Morazzani, V., & Unger, W. (2010). Nanometrology foresight review. Cranfield: Co-nanomet Consortium.