| Zugriffsnummer | 25533 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Nano- and micrometrology at PTB: state of the art and future challenges |
| Autor(in); Institution |
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Härtig, Frank; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Buhr, Egbert; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Wilkening, Günter; PTB-Braunschweig, retired staff
|
| Quelle/Jahr | Optoelectronics, Instrumentation and Data Processing: 46 (2010), 4, 312 - 317 |
| ISSN | 8756-6990 (PRINT) ; 1934-7944 (ONLINE) |
| DOI | |
| Verlag | New York: Allerton Press |
| Freie Schlagworte | dimensional (linear and angular) metrology ; micrometrology ; nanotechnology ; signal modeling |
| Zusammenfassung | In this paper we will provide an overview of methods and instruments developed and applied at the National Metrology Institute of Germany (Physikalisch Technische Bundesanstalt-PTB) for high-precision dimensional (linear and angular) measurements and discuss some challenges for future developments in this important area of metrology. Hinweis: Original Russian text publ. in: Avtometriya 46(2010),4 S. 19-25 |
