| Zugriffsnummer | 25479 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Autocollimator characterization and calibration at the PTB: current status and future progress |
| Autor(in); Institution |
Geckeler, Ralf D.; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Just, Andreas; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Krause, Michael; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 10th ISMQC, the 10th International Symposium on Measurement and Quality Control:(2010), F1-055-1 - F1-055-4 |
| Availability | [CD-ROM] paper no.55 |
| Herausgeber(in) |
Takaya, Y.
|
| ISBN | 978-4-9905119-0-6 |
| Verlag | Tokyo: JSPE Techn. Committee for Intelligent Nano-Measure |
| Konferenzangaben | 10th International Symposium on Measurement and Quality Control (ISMQC-2010), Osaka, 05-09, September, 2010, Japan |
| Freie Schlagworte | autocollimator ; angle ; angle calibration ; topography measurement ; precision metrology ; traceability |
| Zusammenfassung | The form measurement of optical surfaces has been greatly advanced by the development of a new generation of highly accurate surface profilometers which are based on angle measurement. Commercial autocollimators, optical devices for the accurate, contactless measurement of the tilt angle of refelecting surfaces, have been successfully deployed for this purpose. An overview of the current status of autocollimator characterization and traceable calibration at the PTB, the National Metrology Institute of Germany, and its implications for their optimal application are provided, as well as information on current and future challenges and expected progress. We will present information on the challenges to angle metrology, e.g., posed by the autocollimator itself, especially when it is operating at small apertures, by its changing measuring conditions in the profilometer, by characteristics of the optical surface, and by the limits of Key Comparison with 26 international participants on angle metrology with autocollimators, headed by the PTB as a pilot laboratory, is provided. |
Zitierung
Geckeler, R. D., Just, A., Krause, M., & Bosse, H. (2010). Autocollimator characterization and calibration at the PTB: current status and future progress. 10th International Symposium on Measurement and Quality Control (ISMQC-2010), Osaka, 05-09, September, 2010, Japan.