| Zugriffsnummer | 24972 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development of a micro-SPM head array with exchangeable cantilevers |
| Autor(in); Institution |
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Li, Zhi; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Herrmann, Konrad; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology: 1 (2010), 249 - 253 |
| Herausgeber(in) |
Spaan, Henny
|
| ISBN | 978-0-9553082-8-4 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | Euspen, Delft, 31, May - 04, June, 2010, The Netherlands |
| Freie Schlagworte | Scanning probe microscope (SPM) ; Micro-electro-mechanical system (MEMS) ; Micro-SPM head array ; Electrostatic comb-drive ; Exchangeable cantilever |
| Zusammenfassung | In this paper a MEMS based micro-SPM head array is proposed to enhance the performance of the currently available nano-measuring machines and effectively reduce the measurement time for large specimen. It consists of 1 × N ( N = 7 in our case) micro-SPM heads/units, realized in one chip by MEMS technique. And it can be easily extended to a micro-SPM head matrix. The kern of each SPM head is an electrostatic comb-drive actuator, whose main shaft protrudes out of the MEMS chip to sense the surface topography of a specimen under test. To take advantage of the outstanding lateral resolution of the AFM cantilever, a concept of post assembly is presented to economically realize a micro-SPM, in which a specially designed structure at the other end of the main shaft is introduced to mount the conventional cantilever mechanically. The structure design and simulation of mechanical and electrical performances of the mico-SPM head will be detailed in this paper. |
